Harun Solak received his Ph.D. in Electrical Engineering from the University of Wisconsin-Madison. After a postdoctoral appointment at the same university he joined the Paul Scherrer Institute in Switzerland where he developed EUV interference lithography systems with record breaking performance. Dr. Solak has more than one hundred technical articles published in the fields of nanolithography, x-ray microscopy and semiconductor device reliability. He is the co-founder and CEO of Eulitha AG.